%0 Journal Article %T Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films %V 37 %N 6 %U https://www.scopus.com/inward/record.uri?eid=2-s2.0-85075003893&doi=10.1116%2f1.5122737&partnerID=40&md5=d5466eadae5bf55d1a99b1a6802f967b %J Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics %A Gilliot, M. %A Hadjadj, A. %A Stchakovsky, M. %D 2019