{{Cite journal| doi = 10.1116/1.5122737| volume = 37| issue = 6| last1 = Gilliot| first1 = M.| last2 = Hadjadj| first2 = A.| last3 = Stchakovsky| first3 = M.| title = Revised wavelength-by-wavelength inversion of ellipsometry data of semiconductor thin films| journal = Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics| date = 2019}}